Experimental and theoretical study on the production of carbide-rich composite nano-coatings

Carbides are known for high hardness and corrosion resistance therefore applicable as protective coatings. C/Si C/W multilayers (the individual layer thicknesses were between 10 20 nm) have been irradiated at room temperature by argon xenon ions. The energies varied 40 120 keV while the fluences in range of 0.07 - 6 × 1016 ions/cm2. SRIM simulation was applied to proper ion energy. irradiation induced intermixing carbide (SiC WC) formation interfaces already lowest fluence. component in-depth distribution has determined AES depth profiling which showed that it greatly a function conditions structure. In both material pair thickness produced increased with square root fluence but mixing mechanism different: local spike ballistic C/Si. efficiency lower than C/W.